基于PSD的非接触式二维动态角度精密测量系统
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High precision non contact two dimensionaldynamic angle measurement system based on PSD
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    摘要:

    非接触式角度测量广泛用于机械制造、精密测量、航空航天等领域。在一种高速振镜的二维角度测试装置中,需要大范围(±10°)、高速率(80kHz)、高精度的非接触式二维角度测量方式,传统的动态角度测量方式都不能满足要求。基于PSD的高速响应特性,设计了光电反射式二维动态角度高精度测量系统,可以取得更好的技术指标。首先,采用高精度的PSD检测器和激光器等光学器件,可以实现高精度、大范围的非接触式角度测量;此外,利用坐标系变换得到二维机械角度与PSD输出二维位移的关系,并通过FPGA和高速AD采集板实现了高速数据采样,利用数字滤波的方法,大程度的降低了系统的噪声;通过数据插值的方法,对测量数据进行矫正,极大的降低了系统的误差,实现了大范围二维角度的系统误差都在较低水平。通过实验测试,系统可以实现±10°摆角范围的测量,采样频率可达到125kHz,噪声达到0001°,系统误差最大0007°。满足了大范围、高速率、高精度的角度测量要求。

    Abstract:

    Non contact angle measurement is widely used in machinery manufacturing,high precision measurement,aerospace and other fields.In a high speed galvanometer two dimensional angle measurement device,a large range (±10°),high rate (80 kHz),and high precision non contact two dimensional angle measurement method is required.The traditional dynamic angle measurement method cannot meet the requirements.Based on the high speed response characteristics of PSD,a photoelectric high precision non contact two dimensional dynamic angle measurement system is designed,which can achieve better measurement performance.First,the use of high precision PSD detectors and lasers and other optical devices can achieve high precision and large wide non contact two dimensional angle measurement;in addition,the relationship between 2D mechanical angle and 2D displacement of PSD is obtained by coordinate system transformation,and a high speed data sampling through FPGA and high speed AD acquisition board is achieved.The use of digital filtering greatly reduces the noise of the system;through the method of data interpolation,the measurement data is corrected,which greatly reduces the error of the system.The system error of large scale two dimensional angle is at a low level.Through experimental testing,the system can achieve ±10° swing angle measurement,the sampling frequency can reach 125 kHz,the noise and resolution can reach 0.001°,and the maximum system error is 0.007°.It meets the requirements of large range,high speed and high precision angle measurement.

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李波,董文博,肖爱民,于梦溪,葛文奇,何建国.基于PSD的非接触式二维动态角度精密测量系统[J].激光与红外,2021,51(6):787~796
LI Bo, DONG Wen-bo, XIAO Ai-min, YU Meng-xi, GE Wen-qi, HE Jian-guo. High precision non contact two dimensionaldynamic angle measurement system based on PSD[J]. LASER & INFRARED,2021,51(6):787~796

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  • 最后修改日期:2020-10-26
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  • 在线发布日期: 2021-07-01
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