Temperature plays an important role in the output characteristics of all solid state ultraviolet lasers.In order to stabilize the output of all solid state UV laser,it is necessary to control its temperature accurately. This paper mainly introduces a temperature control method based on vapor compression variable frequency refrigeration system and electrothermal compensation to realize high precision temperature control of UV laser. The method uses PID as the basic control algorithm to control the speed of the micro DC variable frequency compressor and the electrothermal power,so as to realize the constant temperature system with the characteristics of small volume,light weight,high efficiency and good temperature control. Experimental results show that the method has a fast response speed,and it only takes 6 minutes to stabilize the system； the control accuracy is high,and the water temperature accuracy can reach 0.01℃.Based on the UV laser will be used more and more in marking,precision cutting and many other industries,this method should be more popularized because of its advancement and practicality.