Infrared detectors are widely used in infrared reconnaissance,warning,guidance and remote sensing areas.In the recent years,with the continuous traction of application demand,infrared detectors should not only maintain high resolution and high sensitivity,but also take into account the development of miniaturization and integration.The ultimate performance and functionality of traditional monolithic signal processing circuit has been difficult to meet the needs of infrared systems in the future,infrared detectors based on 3D integration gradually come to be a solution.This paper briefly introduced the three dimensional integration technology of microelectronics,summarized the progress of relevant foreign research institutions in the development of infrared detectors using three dimensional vertical technology,and discussed the challenge of three dimensional integration technology in the development of infrared detectors.
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谭振,聂媛,于艳,田震,喻松林.三维集成技术在红外探测器中的应用[J].激光与红外,2022,52(2):163~169 TAN Zhen, NIE Yuan, YU Yan, TIAN Zhen, YU Song-lin. Application of 3D integration technology in infrared detector[J]. LASER & INFRARED,2022,52(2):163~169