Superluminescent diode(SLED)is an incoherent light source,which has the advantages of high laser power,high coupling efficiency,wide spectrum and short coherence length. It can be applied in optical coherence tomography technology,wavelength division multiplexing technology and other fields. The future development direction is greater power,greater bandwidth and lower extinction ratio.In this paper,the design of high performance SLED chips with buried heterostructures in the 1310 nm band and the fabrication of waveguides are proposed.The waveguide is inclined at 7°.The front and back facets are coated with anti reflection film with a reflectivity of less than 0.1%.It is concluded that the fabricated SLED chip has a large saturated output power(more than 20 mW),a low polarization extinction ratio(less than 0.5 dB),and good spectral characteristics(3 dB spectral bandwidth is greater than 50 nm；spectral ripple is less than 0.1 dB).