北京市自然科学基金项目资助。
盛渤轩,侯煜,张帆,张昆鹏,张喆,张紫辰.飞秒激光加工快速测高随动方法研究[J].激光与红外,2022,52(5):641~645
SHENG Bo-xuan, HOU Yu, ZHANG Fan, ZHANG Kun-peng, ZHANG Zhe, ZHANG Zi-chen. Research on confocal altimetry cascade control in high speed femtosecond laser processing[J]. LASER & INFRARED,2022,52(5):641~645