In order to meet the technical requirements of high line count and long distance detection of lidar systems,an electromagnetic laser micro scanning mirror mechanism for hybrid lidar systems is proposed.The mirror diameter is 12mm,and the micro scanning mirror is made of TC4 titanium alloy material,and the "I shaped" mechanical structure scheme is proposed.Nastran software is used for mechanical simulation analysis,and a test platform is built to test the performance such as deflection angle and resonance frequency of the micro scanning mirror The experimental results show that the first order resonance frequency of the laser micro scanning mirror is 298 Hz,and the maximum deflection angle is 8.12°,which satisfying the technical requirements.Compared with traditional MEMS scanning mirrors,it ensures high resonance frequency and improves the optical aperture,,which is of great significance to the further industrialization development of lidar.
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陆英.一种用于激光雷达的微振镜设计[J].激光与红外,2022,52(6):900~904 LU Ying. A design of micro scanning mirrorbased on laser radar system[J]. LASER & INFRARED,2022,52(6):900~904