In order to explore the influence law and formation mechanism of water jet guided laser processing(WJGLP)technology on the processing of micro holes in nickel based single crystal superalloy under different laser powers and scanning speeds,a self developed WJGLP platform is used to process 1mm micro holes of nickel based single crystal superalloy CMSX 4 under different laser powers and scanning speeds.Then,the white light interferometer(WLI),scanning electron microscope(SEM)and Vision64 software were used to obtain the variation of processing time,pore size,roundness,taper and recast layer thickness with different laser power and scanning speed,and to study the formation mechanism of the change rule.The results show that processing time,taper and recast layer thickness are related to laser energy intensity.With the increase of laser energy intensity,the processing time is shortened,the taper becomes smaller,and the thickness of recast layer becomes smaller.The aperture and roundness are affected by laser energy intensity and its distribution on the material surface.Only when the laser energy range is controlled in the water beam diameter range,the aperture and roundness can obtain better processing quality.