广东省重点领域研发计划项目(No.2019B010144001)资助。
刘敏,郑柳,何志,王文武.硅晶圆中注入10 MeV磷的连续激光退火激活[J].激光与红外,2022,52(7):1000~1003
LIU Min, ZHENG Liu, HE Zhi, WANG Wen-wu. Continuous laser annealing for activating 10 MeV implanted phosphorus in silicon wafer[J]. LASER & INFRARED,2022,52(7):1000~1003