Silicon photonic modulator is an important electro optical conversion element in silicon based optical links,and the performance of traveling wave electrode,as a key part of silicon optical modulator carrying microwave signals,is a core factor in determining the modulation efficiency and transmission loss of the modulators.Currently,the design of traveling wave electrodes is mainly divided into coplanar waveguide structure and coplanar stripline structure.A coplanar stripline has a larger design matching range with respect to a coplanar waveguide,but the signal shielding capability is lower than that of the CPW′s double grounded system,which leads to the emergence of problems such as higher order mode excitation and multimode interference.In order to optimize the modulator performance,many scholars have proposed finger shaped extension electrodes,T shaped extension electrodes,segmented electrodes,and other shapes to optimize the electrode structure to achieve impedance matching while enhancing electro optical interactions and reducing the transmission loss.This paper summarizes the research results of domestic and foreign scholars on traveling wave electrodes,and analyzes and prospects the development trend of traveling wave electrodes.