In order to achieve high quality and high efficiency cutting of carbon fiber reinforced composites,water jet guided laser processing is used for the CFRP microgroove processing.The influence of the laser power,scanning speed and scanning path overlap rate on the width of the heat affected zone and the material removal rate are investigated by the orthogonal and one factor experimental methods and optimized with this goal in mind.The results show that the laser power and the overlap rate of the scanning path have a significant effect on the width of the heat affected zone and the material removal rate.When the laser power is 35 W,the scanning speed is 4mm/s and the scanning path overlap rate is 40%,the width of the heat affected zone is 184.484μm,and the material removal rate is 0.068mm3/s,which can obtain smaller width of the heat affected zone and higher processing efficiency.