离轴抛物面反射镜的投影畸变校正研究
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Research on correction of projection distortion of off axis parabolic mirror
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    摘要:

    光学元件在使用基于计算机控制光学表面成形技术(Computer Controlled Optical Surfacing,CCOS)的设备进行迭代加工时,需要导入光学干涉测量的面形数据。而使用无像差点法的自准直检测光路测量离轴凹抛物面反射镜时,由光路产生的投影畸变会使检测的面形图发生变形,进而导致工件的面形质量难以快速收敛。针对此问题,本研究提出了一种基于自准直检测光路的离轴凹抛物面镜的畸变校正方法。通过确定干涉仪中CCD测量坐标系和镜面坐标系的投影坐标变换,结合少量标记点的标定,对整个面形进行重构,从而校正投影畸变。针对某大口径离轴四反光学系统的Φ430mm等厚离轴凹抛物面主镜的自准直检测,以畸变校正后的检测数据作为磁流变设备的加工指导,表面面形精度RMS最终达到λ/80(λ=6328nm)。该方法基于少量标记点实现高精度面形校正,能够有效缩短CCOS迭代加工过程中的畸变校正时间,在保证表面质量要求的情况下提升光学元件加工效率。

    Abstract:

    The surface shape data of optical interferometry are required when the optical components are iteratively machined using equipment based on Computer Controlled Optical Surfacing(CCOS).However,when the off axis concave parabolic mirror is measured using the autocollimation detection optical path without image handicap method,the projection distortion caused by the optical path distorts the detected surface map,which makes it difficult to quickly converge on the surface quality of the workpiece.To address this problem,a distortion correction method for off axis concave paraboloid mirror based on autocollimation detection optical path is proposed in this paper.By determining the projection coordinate transformation of CCD coordinate system and mirror coordinate system in the interferometer,and combining with the calibration of a few mark points,the whole surface shape is reconstructed to correct the projection distortion.According to the autocollimation detection of Φ 430mm off axis concave parabolic main mirror of a large diameter off axis quad mirror optical system,the surface shape accuracy RMS reaches λ/80(λ=632.8 nm)by using the detection data after distortion correction as the machining guide of Mr Equipment.This method achieves high precision surface shape correction based on a small number of marks,which can effectively shorten the distortion correction time in CCOS iterative machining,and improve the machining efficiency of optical components while ensuring the surface quality requirements.

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罗志超,何煜,李瑶艳,邵传强,杨晓飞.离轴抛物面反射镜的投影畸变校正研究[J].激光与红外,2024,54(11):1744~1750
LUO Zhi-chao, HE Yu, LI Yao-yan, SHAO Chuan-qiang, YANG Xiao-fei. Research on correction of projection distortion of off axis parabolic mirror[J]. LASER & INFRARED,2024,54(11):1744~1750

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  • 最后修改日期:2024-04-09
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  • 在线发布日期: 2024-11-18
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