p-on-n型碲镉汞小间距探测器研究
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Study of p on n type HgCdTe little pixel detector
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    摘要:

    p on n结构的碲镉汞红外探测器芯片的暗电流低、少子寿命长,是目前高性能红外探测器的主流发展方向,同时,为了满足未来红外探测器小型化的发展需求,本文主要针对p on n型长波10μm像元间距1280×1024探测器芯片进行了研究,采用了p on n异质结的技术路线,对小间距台面成型及钝化技术进行研究,通过SEM评价台面及钝化形貌,通过CV测试评价出钝化层质量,并进行了探测器的研制,采用半导体参数测试仪对芯片在77 K下进行pn结的I V特性的评价,测试出IV特性曲线,并对芯片进行倒装互连电路进行了性能测试,获得了性能较好的探测器芯片。该研究对小间距长波p on n碲镉汞焦平面器件的制备具有重要意义。

    Abstract:

    HgCdTep on n structure infrared detector has low dark current and long lifetime,which is the main development direction of high performance infrared detectors at present.Meanwhile,in order to meet the development needs of future infrared detector miniaturization,this paper mainly studies p on n long wave 10 micron pixel spacing 1280×1024 detector.The p on n heterojunction technical route was adopted to study the forming and passivation technology of the small pitch mesa.The mesa and passivation morphology were evaluated by SEM,the quality of the passivation layer was evaluated by CV test,and the detector was developed.The I V characteristics of the pn junction of the detector were evaluated by a semiconductor parameter tester at 77K,and the IV characteristic was tested.The performance of the detector is tested by the test of the performance,and the detector with good performance is obtained.This study is of great significance for the preparation of small pitch long wave p on n infrared detector devices.

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王鑫,刘世光,张轶,赵旭豪,王娇. p-on-n型碲镉汞小间距探测器研究[J].激光与红外,2025,55(3):395~398
WANG Xin, LIU Shi-guang, ZHANG Yi, ZHAO Xu-hao, WANG Jiao. Study of p on n type HgCdTe little pixel detector[J]. LASER & INFRARED,2025,55(3):395~398

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  • 最后修改日期:2024-09-30
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  • 在线发布日期: 2025-03-14
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